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    氣體質量流量計/控制器

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    BRONKHORST質量流量控制器

     

    產品特點:
    量程最小0-1mL/min;最大0-1250L/min
    最大壓力可達400BAR
    精確的3F校準
    無可移動部件
    快速響應時間
    模塊化設計
    低壓降
    全金屬表面拋光處理

    ACCURACY
    (ATCALIBRATIONUNDEROPERATINGCONDITIONS)
    Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale
    Polynomial calibration: ±0.5% of reading  plus ±0.1% of full scale
    REPRODUCIBILITY
    < 0.1% full scale
    REPEATABILITY
    < 0.2% of reading
    RESPONSETIME
    1...2 sec. (faster on request)
    CONTROL STABILITY
    < ±0.1% full scale (typical for 1 ln/min N2)
    PRESSURE SENSITIVITY
    0.1%/bar typ. N2
    0.01%/bar typ. H2
    ATTITUDE SENSITIVITY
    max. error 0.015% at 1 bar N2and 90°change
    VIBRATION SENSITIVITY
    negligible
    TEMPERATURE SENSITIVITY
    zero point approx. 0.05% of full scale/°C
    SUPPLY VOLTAGE SENSITIVITY
    zero at correct supply voltages (acc. to electr. data)
    CONTROLVALVE
    closes automatically at setpoint < 1%
    LEAKINTEGRITY
    tested < 2 x 10-9mbar l/s He
    RF
    CE approved design
    MECHANICALPARTS
    PROCESSCONNECTIONS
    see model number code; other on application
    MATERIAL SOFCONSTRUCTION
    stainless steel AISI 316L or comparable
    SEALS
    Viton, EPDM, elast. PTFE, other on application
    SURFACE QUALITY
    Ra 0.2...0.6 µm
    OPERATING LIMITS
    RANGE
    2%...100%
    TYPESOFGASES
    all gases compatible with AISI 316L
    TEMPERATURE
    -10 °C up to +70 °C
    WARMING-UPTIME
    30 min. for optimum accuracy,
    2 min. for accuracy ±2% of full scale
    ELECTRICAL PROPERTIES
    SUPPLY VOLTAGE
    mass flow meter +15 V...24 V, 50 mA
    mass flow controller +15 V, 250 mA -15 V, 30 mA
    mass flow controller +24 V, 190 mA
    OUTPUT SIGNAL
    0...5 V, 0...10 V, 4…20mA
    SETPOINT SIGNAL
    0...5 V, 0...10 V, 4…20mA
    ELECTRICAL CONNECTION
    9-pin sub-D connector, cable length independent

     

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